An earthquake with a preliminary magnitude of 6 struck southern Taiwan early Tuesday, according to the U.S. Geological Survey, leaving 15 people with minor injuries.

In a statement to DCD, TSMC said that as a result of the earthquake, its fabs in Taiwan’s Southern Science Park recorded a maximum seismic intensity of level 5, while fabs in Central Science Park recorded a maximum intensity of level 4 and Hsinchu Science Park fabs (including Longtan and Zhunan) recorded a maximum intensity of level 3.